多晶硅鑄錠爐

ESOT90系列拉晶爐主要用于半導(dǎo)體材料 高純材料  超導(dǎo)材料的制備.如硅材料提純.

多晶硅定向凝固爐（簡稱結(jié)晶爐）Polycrystalline silicon directional solidify furnace(crystallize furnace for short)

用于used in

太陽能級硅錠制造，也可以用于其他半導(dǎo)體材料提純。

Making solar energy silicon ingot and purifying other transistor materials

特點Feature

控制精度高，結(jié)晶速度自由調(diào)節(jié)

Higher precision for the control and free adjusting crystallize speed

采用感應(yīng)熔煉法，增加溶液攪拌，熔煉速度快

Adopt induction smelting, increase solution stirring and the smelting speed is fast.

定向凝固保溫采用特制加熱電源

Adopt specially made heating power for the directional solidify keeping temperature

具有三相電流平衡，維護費用低

There are three-phase current balance and lower maintenance

采用恒溫度控制儀，可設(shè)置148段加熱工藝曲線

Adopt constant temperature control apparatus and you can set 148 heating technology curves

爐室采用真空爐體，真空度高，抽氣速度快

Adopt three-house vacuum chamber for the furnace with higher vacuum and faster air pump

主要技術(shù)參數(shù)Main technique parameters

熔煉容量：10-300KG Capacity of smelting

電源功率：50-400KW     Power

升溫速率：40℃/Min   Raising temperature speed

爐溫均勻性：±5℃       Even quality of furnace temperature

極限真空度：6.67×10^-2Pa     Limit vacuum

壓升率：    0.01PaL/S      Rate of raising voltage

額定充氣壓力：0.05Mpa      Rated giving air pressure

鑄錠方式：下降定向凝固   The way of ingot casting: Descending directional solidify

伺服控制范圍：0.01mm-6mm/Min           Range for serve control

定向凝固速率：0.03mm-0.5mm/Min         Rate of directional solidify

坩堝上升速度：80-100 mm/Min            Raising speed of crucible