Features:
> 2-Axis electronic level for leveling to
ground or to a learned reference
> Numerical readout for both pitch and
roll allows for statistical analysis and
calibration to specification
> Intuitive graphics screens and touch
screen LCD simplify operation
> Adjustments can be made
conveniently using the remote real
time display
> Carbon fiber wafer mimics the
geometry and weight of a silicon wafer
> New high resolution, high accuracy
electronic level
> New low profile – fits through more slit
valves
> Fast settling time
> Improved software with user setup
capabilities
> Settable tolerances w/ graphical
pass/fail indication
> Data logging allows dynamic studies
and facilitates monitoring equipment
over time
其它相關型號：
MicroTool EL-1503 Form Factor：150mm
MicroTool EL-2003 Form Factor：200mm
MicroTool EL-3003 Form Factor：300mm
MicroTool EL-4503 Form Factor：450mm
MicroTool EL-5003 Form Factor：1” X 3” X 3” Block
MicroTool EL-5003-Reticle Form Factor：Reticle
MicroTool LP-3004 300mm Load Port Checker With AMHS Compatibility
MicroTool FG-3000 Loadport Force Gage
