MITO DENKO水戶電工MBE-260_MBE裝置
MBE裝置MBE-260概要：
水戶電工MBE設備是超高真空裝置，可以用從外部引入的激光在真空中激發，并將材料沉積在襯底上。
MBE裝置MBE-260規格參數：
Configure Spec
Processing room
and vacuum exhaust system Chamber Sharpφ260mm Spherical SUS
Reaching vacuum Less than6.7×10-7Pa (5×10-9Torr)
Ceramic bearing
turbo pump 250L/s
Target revolution unit φ20mm×6 axes
Rotation / revolution motor drive (PC control)
Substrate heating unit Infrared lamp substrate heating unit (can be changed to semiconductor
laser substrate heating unit)
Size of substrate 10mm
Maximum
heating temperature Above 800℃
Common specification Power supply / control rack (JIS standard compliant) integrated chamber frame
PLD automatic control system (PC and control software)
了解更多：http://www.hapoin.com/Science_Device/
MITO DENKO水戶電工MBE-260_MBE裝置相關產品：
衡鵬供應
MITO DENKO水戶電工PLD-M復合PLD設備
MITO DENKO水戶電工RHEED-1000 RHEED Unit
MITO DENKO水戶電工SOURCE-1250分子束蒸發源
