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LIF系列高精度
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Model |
Basline error |
Substrate and mounting |
Interpolation error |
Measuring length |
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Accuracy grade |
Intervall |
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± 1 μm |
≤ ± 0.225 μm/ 5 mm |
Scale of Zerodur glass ceramic or glass, bonded with PRECIMET adhesive film |
± 12 nm |
70 mm to 1020 mm |
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LIF 471/481
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Linear scale |
LIF 401 R |
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Measuring standard* Coefficient of linear expansion |
SUPRADUR phase grating on Zerodur glass ceramic or glass; grating period 8 μm αtherm = (0±0.1) · 10–6 K–1 (Zerodur glass ceramic) αtherm ? 8 · 10–6 K–1 (glass) |
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Accuracy grade* |
±1 μm (only for Zerodur glass ceramic), ±3 μm |
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Baseline error |
≤ ±0.225 μm/5 mm |
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Measuring length ML* in mm |
70 120 170 220 270 320 370 420 470 520 570 620 670 720 770 820 870 920 970 1020 |
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Reference marks |
One at midpoint of measuring length |
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Mass |
0.8 g + 0.08 g/mm measuring length |
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Scanning head |
AK LIF 48 |
AK LIF 47 |
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Interface |
1 VPP |
? TTL |
